Within the scope of the project, an interferometric measurement setup is being developed which is capable to detect shape deviations of rotating precision components with a radius of more than 100 mm.  The surface of the measured object is successively measured in several annular sub-apertures of up to 8 mm width using a high-speed line scan camera with a line rate of up to 200,000 lines per second, which are assembled into the overall topography using a stitching program. Between the individual measurements, the sensor is repositioned by a motion system and tracks the inclination of the surface within the measurement field. The system calculates height values in real time from the intensity signals captured by the camera, reducing the time required for evaluation. Two interferometric point sensors measuring simultaneously with the line sensor are used to correct positioning deviations induced by the motion system.